Semiconductor

Semiconductor device fabrication involves multiple process steps including transfering wafers from FOUP and loading into a process cassette for processing.

Precision motion control is critical in preventing wafer defects as well as maximizing wafer processing throughput.

 

         
Controller : SPC-3221   Drive : STP-M111A   I/O : 107-D108-XNT

 
 

 

STP-M111A stepper motor driver 4amp